Double laser fault injection microscope - D-LMS

The D-LMS microscope is a high-end dual-laser system designed for laser fault injection, with photon emission detection and thermal laser stimulation capabilities. It enables injection, focusing, and scanning of two laser spots while simultaneously observing the sample from the backside.

Two independent laser spots in the field of view

The double laser fault injection platform integrates two laser sources focused through the same lens.

Each laser spot can vary in size (down to 1µm with x50 objective) and can move independently in the whole objective field of view. Thus, the user can program each spot for scans across strategic zones of the integrated circuit while recording the effects of each laser.

If each spot can move totally independently across the XY plane of the field of view of the lens, the microscope itself is also mounted on high-resolution XYZ stages (min step size : 20nm) to scan larger areas above the sample.

The two lasers that are integrated in the D-LMS can generate temporally independent pulses too.

Optispot

Our motorized OPTISPOT technology has been specially designed for fault injection applications. Optispot enables a perfect laser focus and hence a minimal laser spot size whatever the silicon substrate thickness. This tool can also be helpful to locate the regions of interest by enlarging laser/silicon interaction volume. It includes software commands and associated DLLs.

Combining PDMs and OPTISPOT technology opens the way to optimized scanning methods associating fast large spot scanning and precise ultra-small spot fault area localization, even during a single scan.

Datasheet

Double laser microscope station

User tailored solution

100% configurable systems
Laser Fault Injection, Photon Emission, Thermal Laser Stimulation
Laser safety enclosure
Embedded HMI
Simultaneous vision of circuit details and laser spots with high quality IR vision
Optispot to optimize the waist position in the die for each laser
On-site services and upgrades available
eShard esDynamic environment available

High precision capacity

High precision spot displacements in the objectives field of view
High spatial resolution ~1 µm spot size
Temporal precision: on-demand pulses; pulse
duration from ~1 ns; jitter < 20 ps (Std Dev) with PDM+ Laser
High resolution XYZ motorized stages for automation
Granite frame for high stability
Optical bench on air bed for vibration isolation

The LMS station are fully compatible with esDynamic Analyst Development platform from eShard

esDynamic software platform allows security experts to analyze, attack, pinpoint and refine the security of their products by performing side-channel, white-box cryptography analysis or fault injection.

With esDynamic platform, eShard offers dedicated contents in its Hardware Analysis module to drive ALPhANOV equipment and perform precision fault injections attacks.