Skip to main content

Double laser fault injection microscope - D-LMS

The D-LMS microscope station for double laser fault injection is a platform allowing to focus and scan independently two laser spots for security evaluation of integrated circuits. Ideal for double spot injection processes, it offers all the spatial and temporal flexibility to analyze circuits through the back side.

Product reference: D-LMS - Double Laser Microscope Station

Double laser fault injection bench
Double laser fault injection bench inside safety enclosure

Two independent laser spots in the field of view

The double laser fault injection platform integrates two independent PDM+ laser sources (Pulse-on-Demand Module) focused through the same lens. Each laser spot varying in size from 1 µm to several tens of micrometers can move independently from the others on the whole field of view of the lens.

Thus, the user can program each spot for scans across strategic zones of the integrated circuit while correlating the effects of each PDM+ laser sources.


If each spot can move totally independently across the XY plane of the field of view of the lens, the microscope itself is mounted on high-resolution XYZ stage (50 nm) to scan above the sample.

 

Independence and temporal agility of laser spots

PDM laser source - injection laser faults
PDM laser source

Two PDM+ laser sources are integrated in our double laser fault injection systems microscope systems. Each source can thus generate temporally independent, or synchronized pulses for total temporal control.  

These lasers from the PDM range can generate pulses on demand, from 1 ns to continuous wave; from single shot to 250 MHz with a jitter less than 8 ps. This temporal control is required to synchronize the two laser injections with the operation of the circuit.

Different PDM models can be implemented on the D-LMS bench having:

  • different wavelengths available for the rear panel, 980 nm and/or 1064 nm,
  • different powers (from 2 W to 4 W) depending on the sensitivity of the sample and the thickness of the silicon,
  • the new PDM HPP (High Pulse Performance) adapted for extremely short pulses (sub-ns).

 

Laser spots visible through the silicon of one circuit - injection laser faults
Laser spots visible through the silicon

A high-quality infrared vision

ALPhANOV offers a wide range of high-performance lenses focusing on optical quality, high numerical aperture for better resolution and high transmission. The D-LMS bench can integrate up to 4 lenses via a manual turret or 5 lenses via a motorized turret. You can choose the most appropriate magnifications, from the 50X lens offering the smallest spot sizes to the 2.5X lens for a global view of the sample or larger spot sizes for faster scans.

 

A wide range of lenses

ALPhANOV offers you a whole range of high-performance lenses by prioritising optical quality, a high numerical aperture for better resolution and high transmission. The D-LMS bench can integrate up to 4 lenses via a manual turret or 5 lenses via a motorised turret. You can choose the most appropriate magnifications, from the 50X lens offering the slimmest spot sizes to the 2.5X lens for a global vision of the sample or larger spot sizes for faster scans.  

 

 
Laser bench piloted by EsDynamic software - injection laser faults
Laser bench piloted by EsDynamic software

The driving software: strong partnership with eShard

All our benches can now be controlled via esDynamics from eshard. A powerful platform enables to use notebooks specially developed with python, to integrate your own developments and summarize and analyze your results. The esDynamic platform is also used for side-channel analysis. 

 

A platform for multiple functionalities

Experts in optics and lasers, ALPhANOV customize the laser systems to fit your projects, your budget and your skills. From made-to-measure bench to turnkey bench, we design the best solution for you, from a simple microscope to a completely automated machine integrating a CE-certified laser security enclosure mounted on an active optical table.

The S-LMS (single spot) or D-LMS (double spot) systems are now compatible with all the latest new features for security evaluation of integrated circuits:

  • Component analysis by photoemission
  • Component analysis by thermal laser stimulation
  • Laser fault injection by extremely short pulses with the brand new PDM-HPP
  • Every year, ALPhANOV brings new developments and improvements for its laser benches onto the market.

 

Product features

  • Two independent laser spots at 980 and/or 1064 nm

  • Variable spot sizes from 1 µm to 13 µm

  • Coaxial IR vision and lighting for the back side

  • Variable pulse duration from 1 ns to continuous wave, from single shot to 250 MHz.

  • Jitter <8 ps

  • Transmission >70%

  • Can be controlled and driven with Python

Injection laser faults - double spot laser bench

 

Options

  • CE-certified laser safety enclosure
  • Photoemission kit
  • Laser injection for thermal laser stimulation
  • esDynamic software platform from eShard
Injection laser faults - Laser safety enclosure
Datasheet Double Spot laser

Associated products or services